Facility

The experimental equipments mainly relies on the support of two key laboratories (State Key Laboratory of Materials for Integrated Circuits and Key Laboratory of Terahertz Solid-State Technology) of Shanghai Institute of Microsystems and Information Technology (SIMIT), Chinese Academy of Sciences (CAS). The two laboratories have abundant device characterization equipment (low temperature electron transport system, Fourier transform infrared spectrometer, spectrum analyzer, microwave RF source, low temperature probe stage, etc.), semiconductor preparation process platform (molecular beam epitaxy equipment, lithography machine, electron beam evaporation, dry etching machine, dielectric film vaporization equipment, etc.) and device back-end packaging process line (scribing machine, wire bonding machine, placement machine, etc.), which The equipment will provide strong hardware guarantee for the smooth development of our group.